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Effects of damage build-up in range profiles in crystalline Si; Molecular dynamics simulations

✍ Scribed by J. Peltola; K. Nordlund; J. Keinonen

Book ID
114166070
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
363 KB
Volume
195
Category
Article
ISSN
0168-583X

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