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Effects of coil dc potential on ion energy distribution measured by an energy-resolved mass spectrometer in ionized physical vapor deposition

โœ Scribed by E. Kusano; T. Saitoh; T. Kobayashi; K. Fukushima; N. Kikuchi; H. Nanto; A. Kinbara

Book ID
125940960
Publisher
AVS (American Vacuum Society)
Year
1999
Tongue
English
Weight
392 KB
Volume
17
Category
Article
ISSN
0734-2101

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Ion energy distribution in ionized dc sp
Ion energy distribution in ionized dc sputtering measured by an energy-resolved mass spectrometer
โœ E. Kusano; T. Kobayashi; N. Kashiwagi; T. Saitoh; S. Saiki; H. Nanto; A. Kinbara ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 121 KB

Ion energy distribution of sputtered Ti particles in ionized dc sputtering has been measured by an energy-resolved mass spectrometer. The energies of the Ti> and Ar> ions were measured by a Balzers PPM421 plasma monitor. The experimental results showed that the energy of sputtered Ti particles was e