Effects of chemical mechanical planarization slurry additives on the agglomeration of alumina nanoparticles II: Aggregation rate analysis

✍ Scribed by Brahma, Neil; Talbot, Jan B.

• Book ID: 121702628
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 387 KB
• Volume: 419
• Category: Article
• ISSN: 0021-9797
• DOI: 10.1016/j.jcis.2013.12.040