✦ LIBER ✦
Effects of CH4gas and substrate temperature on hydrogenated amorphous carbon (a-C:H) films fabricated using DC facing target sputtering
✍ Scribed by JongGoo Bhak, Chan Kim, Ilsu Rhee, Hong Tak Kim
- Book ID
- 119937320
- Publisher
- The Korean Physical Society
- Year
- 2013
- Tongue
- English
- Weight
- 288 KB
- Volume
- 62
- Category
- Article
- ISSN
- 0374-4884
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