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Effects of CH4 addition to Ar–O2 discharge gases on resistivity and structure of ITO coatings

✍ Scribed by E Kusano; N Kashiwagi; T Kobayashi; H Nanto; I Kondo; A Kinbara

Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
442 KB
Volume
51
Category
Article
ISSN
0042-207X

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