✦ LIBER ✦
Effects of ceric ammonium nitrate (CAN) additive in HNO3solution on the electrochemical behaviour of ruthenium for CMP processes
✍ Scribed by W.-J. Lee; H.-S. Park; S.-I. Lee; H.-C. Sohn
- Book ID
- 111587579
- Publisher
- Springer
- Year
- 2004
- Tongue
- English
- Weight
- 391 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0021-891X
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