Effects of boron concentration upon oxygen precipitation in CZ silicon

✍ Scribed by D.A.P. Bulla; W.E. Castro Jr.; V. Stojanoff; F.A. Ponce; S. Hahn; W.A. Tiller

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 681 KB
• Volume: 85
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(87)90208-9