Electrical properties of Pb(Zr,Ti)O3 fil
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Hyun-Suk Hwang; Young Park; Won Seok Choi
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Article
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2008
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Elsevier Science
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English
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Pb(Zr,Ti)O 3 thin films were successfully prepared on a Pt bottom electrode with indium tin oxide coated glass substrates using RF magnetron sputtering. Use of the indium tin oxide coated glass substrate reduced the fatigue characteristics and provided for excellent crystallization of the Pb(Zr,Ti)O