✦ LIBER ✦
Effects of backstreaming and real or virtual leaks on the vacuum contamination in a turned-off turbomolecular pumped uhv system
✍ Scribed by N. Venkataramani; H.A. Pathak; S.B. Bhatt
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 675 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0042-207X
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