✦ LIBER ✦
Effects of AsH3 surface treatment for the improvement of ultra-shallow area-selective regrown GaAs sidewall tunnel junction
✍ Scribed by Takeo Ohno; Yutaka Oyama; Ken Suto; Jun-ichi Nishizawa
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 266 KB
- Volume
- 6
- Category
- Article
- ISSN
- 1369-8001
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