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Effects of ArF excimer irradiation on single energy and multi energy Ge ion implanted silica

โœ Scribed by R.H. Magruder III; R.A. Weller; R.A. Weeks; J. Wehrmeyer; R.A. Zuhr; D.K. Hensley


Book ID
117144736
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
131 KB
Volume
280
Category
Article
ISSN
0022-3093

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