✦ LIBER ✦
Effects of annealing temperature on ultra-low dielectric constant SiO2 thin films derived from sol–gel spin-on-coating
✍ Scribed by Woei Chang Ee; Kuan Yew Cheong
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 231 KB
- Volume
- 403
- Category
- Article
- ISSN
- 0921-4526
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