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Effects of annealing and crystallization process in amorphous SiGe alloy films

✍ Scribed by Seiichi Hasegawa; Shigeo Yazaki; Tatsuo Shimizu

Book ID: 118330722
Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 469 KB
Volume: 27
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(78)90125-4

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