Effects of Al ion implantation to 4H-SiC on the specific contact resistance of TiAl-based contact materials

✍ Scribed by Kazuhiro Ito; Susumu Tsukimoto; Masanori Murakami

• Book ID: 108275782
• Publisher: Institute of Physics and National Institute of Materials Science
• Year: 2006
• Tongue: English
• Weight: 261 KB
• Volume: 7
• Category: Article
• ISSN: 1468-6996
• DOI: 10.1016/j.stam.2006.04.011