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Effects of 200 keV argon ions irradiation on microstructural properties of titanium nitride films

✍ Scribed by M. Popović; M. Novaković; M. Šiljegović; N. Bibić

No coin nor oath required. For personal study only.

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Effects of 200&#xa0;keV argon ions irradiation on microstructural properties of titanium nitride films