Effective suppression of internal stresses in Co-Cr films using a mixture of Ar and Kr as the sputtering gas

✍ Scribed by Shigeki Nakagawa; Masahiko Naoe

• Book ID: 113318778
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 244 KB
• Volume: 120
• Category: Article
• ISSN: 0304-8853
• DOI: 10.1016/0304-8853(93)91358-e