✦ LIBER ✦
Effect on Al:MO2/In0.53Ga0.47As interface (M=Hf, Zr) of trimethyl-aluminum pre-treatment during atomic layer deposition
✍ Scribed by Lamperti, A.; Molle, A.; Cianci, E.; Wiemer, C.; Spiga, S.; Fanciulli, M.
- Book ID
- 121705583
- Publisher
- Elsevier Science
- Year
- 2014
- Tongue
- English
- Weight
- 704 KB
- Volume
- 563
- Category
- Article
- ISSN
- 0040-6090
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