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Effect of YMnO3 on the high-power and high-temperature piezoelectric characteristics of Pb(Zr0.52Ti0.48)O3 ceramics

✍ Scribed by Dae-Yong Jeong; Jungho Ryu; Dong-Soo Park

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
848 KB
Volume
163
Category
Article
ISSN
0921-5107

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## Abstract The integration and the device realization of Pb(Zr, Ti)O~3~ (PZT) thick films on Si substrates are known to be extremely difficult because the processing temperature of the PZT thick film is close to the melting point of Si. However, PZT thick‐film devices on Si warrant attention as th