✦ LIBER ✦
Effect of wet-chemical substrate smoothing on passivation of ultrathin-SiO2/n-Si(111) interfaces prepared with atomic oxygen at thermal impact energies
✍ Scribed by Angermann, Heike ;Gref, Orman ;Stegemann, Bert
- Book ID
- 111489332
- Publisher
- Walter de Gruyter GmbH
- Year
- 2011
- Tongue
- English
- Weight
- 968 KB
- Volume
- 9
- Category
- Article
- ISSN
- 2391-5471
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