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Effect of well and substrate parameters on the latchup degradation of CMOS structures during e-beam voltage contrast measurements

✍ Scribed by F.M. Roche; S.D. Bocus; P. Girard


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
174 KB
Volume
15
Category
Article
ISSN
0167-9317

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