✦ LIBER ✦
Effect of vacuum ultraviolet radiation on the gap fill properties of Teflon amorphous fluoropolymer film deposited by direct liquid injection
✍ Scribed by Parihar, V.; Singh, R.; Sharangpani, R.; Russell, S.D.; Young, C.A.
- Book ID
- 114538218
- Publisher
- IEEE
- Year
- 2000
- Tongue
- English
- Weight
- 76 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0018-9383
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