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Effect of vacancies on nucleation of oxide precipitates in silicon

✍ Scribed by V.V. Voronkov; R. Falster

Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 115 KB
Volume: 5
Category: Article
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(02)00119-1

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