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Effect of Tip Size on Force Measurement in Atomic Force Microscopy

✍ Scribed by Lim, Leonard T. W.; Wee, Andrew T. S.; O'Shea, Sean J.

Book ID
125985626
Publisher
American Chemical Society
Year
2008
Tongue
English
Weight
98 KB
Volume
24
Category
Article
ISSN
0743-7463

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The atomic force microscope (AFM) continues to fi nd increasing applications in nanoscale imaging, [ 1 ] metrology, [ 2 ] devices, [ 3 ] and manufacturing. [ 4 ] In these applications, tip size and shape critically affect the accuracy, resolution, and reliability of measurements and processes. [ 5 ]