✦ LIBER ✦
Effect of time-varying axial magnetic field on high aspect ratio contact hole etching
✍ Scribed by Ho-Young Song; Yong-Hee Choi; Beom-hoan O; Se-Geun Park; Jin-Sung Oh; Jin-Woong Kim
- Book ID
- 108388648
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 649 KB
- Volume
- 435
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.