Effect of the aluminium content and the
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Ch. Wüstefeld; D. Rafaja; V. Klemm; C. Michotte; M. Kathrein
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Article
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2010
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Elsevier Science
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English
⚖ 774 KB
The effect of aluminium contents and bias voltage on the microstructure of cathodic arc evaporated Ti 1 -x Al x N coatings was investigated with the aid of X-ray diffraction experiments and transmission electron microscopy. The coatings were deposited from mixed Ti-Al targets with different Ti:Al ra