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Effect of thickness on structures of ultrathin diamond-like carbon films

✍ Scribed by XiaoZhou Che; LianHua Chen; HongTao Ma; HongXin Fang


Book ID
107371955
Publisher
Springer
Year
2010
Tongue
English
Weight
520 KB
Volume
55
Category
Article
ISSN
1001-6538

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Thickness dependence of the structure of
✍ Fan-Xin Liu; Zhen-Lin Wang πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 610 KB

The thickness dependence on structure of Diamond-like carbon films of a-C:H deposited by ECR-CVD and ta-C by FCVA has been studied by visible and UV Raman spectroscopy. The results show that the evolution of structure as a function of the thickness for a-C:H films contains two stages: when thickness