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Effect of Thermal Annealing on the Stiffness of an SU-8 Torsional Spring

✍ Scribed by Li, Y.; Kühne, S.; Psychogiou, D.; Hierold, C.

Book ID: 122918971
Publisher: Elsevier
Year: 2012
Tongue: English
Weight: 334 KB
Volume: 47
Category: Article
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.09.367

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