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Effect of the texture of a thin zinc oxide film on the volume acoustic emission

✍ Scribed by A. A. Veselov; A. G. Veselov

Book ID
110131931
Publisher
SP MAIK Nauka/Interperiodica
Year
2002
Tongue
English
Weight
29 KB
Volume
28
Category
Article
ISSN
1063-7850

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## Abstract The thermal activation effects on the stoichiometry of indium zinc oxide (IZO) thin‐film transistors (TFTs) deposited by radio frequency magnetron sputtering process under different oxygen pressure, were investigated as a function of annealing temperature and environment conditions. The