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Effect of the target surface temperature on the distribution of nanoparticles formed by ion implantation

โœ Scribed by A. L. Stepanov; D. Hole; V. N. Popok


Book ID
110127582
Publisher
SP MAIK Nauka/Interperiodica
Year
2001
Tongue
English
Weight
43 KB
Volume
27
Category
Article
ISSN
1063-7850

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