## Abstract Metallic thinβfilm plasticity has been widely studied by using the difference between the coefficients of thermal expansion of the film and the underlying substrate to induce stress. This approach is commonly known as the wafer curvature technique, based on the Stoney equation, which ha
β¦ LIBER β¦
Effect of the substrates of in-situ fabrication of borocarbide thin films
β Scribed by Shunichi Arisawa; Takeshi Hatano; Keikichi Nakamura; Kazumasa Togano
- Book ID
- 108466504
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 590 KB
- Volume
- 308
- Category
- Article
- ISSN
- 0921-4534
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