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Effect of the plasma deposition parameters on the properties of TixCy for hard coatings applications

✍ Scribed by N. Saoula; K. Henda; R. Kesri

Publisher: Elsevier
Year: 2009
Tongue: English
Weight: 286 KB
Volume: 2
Category: Article
ISSN: 1875-3892
DOI: 10.1016/j.phpro.2009.11.097

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