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Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing

✍ Scribed by A. Khaled; M. Raoof; V. Cherman; K. Jans; M. Abbas; Sh. Ebrahim; G. Bryce; P. Verheyen; A. Witvrouw; I. De Wolf

No coin nor oath required. For personal study only.

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