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Effect of the Atomic Ratio of Ba to Ti on Optical Properties of Gold-Dispersed BaTiO3 Thin Films

โœ Scribed by Masami Mori; Tohru Kineri; Kohei Kadono; Toru Sakaguchi; Masaru Miya; Hajimu Wakabayashi; Toshio Tsuchiya


Book ID
110826979
Publisher
John Wiley and Sons
Year
1995
Tongue
English
Weight
467 KB
Volume
78
Category
Article
ISSN
0002-7820

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Effect of nitrogen flow ratio on the str
โœ Shinho Cho ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 674 KB

Aluminum nitride (AlN) films have been deposited on glass substrates at various nitrogen flow ratios by rf reactive magnetron sputtering. The AlN film deposited at 10% of nitrogen flow ratio shows a strongly c-axis preferred orientation with a crystalline size of 100 nm, thickness of 1100 nm, and ba