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Effect of the [Al/Zn] ratio in the starting solution and deposition temperature on the physical properties of sprayed ZnO:Al thin films

✍ Scribed by H. Gómez-Pozos; A. Maldonado; M. de la L. Olvera


Book ID
113790316
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
543 KB
Volume
61
Category
Article
ISSN
0167-577X

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## Abstract Heavily‐doped ZnO:Al films have been deposited on high temperature stable glass substrates using radio‐frequency (RF) magnetron sputtering. The effect of growth temperature on physical properties of the films has been investigated. The microstructure evolved a columnar structure into a