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Effect of temperature on the Ge/GaAs(110) interface formation

✍ Scribed by Ping Chen; D. Bolmont; C.A. Sébenne

Publisher
Elsevier Science
Year
1983
Weight
42 KB
Volume
132
Category
Article
ISSN
0167-2584

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Effect of temperature on the mutual diff
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✍ Matteo Bosi; Giovanni Attolini; Claudio Ferrari; Cesare Frigeri; Marco Calicchio 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 394 KB

We studied the diffusion of Ge, As and Ga in GaAs/Ge and Ge/GaAs epilayers grown at different temperatures by metal-organic vapor phase epitaxy using iso-butylgermane, arsine and trimethylgallium in hydrogen atmosphere at low pressure. The use of low temperature buffer layers was investigated in ord