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Effect of surface structures on integrated seismology measurements

โœ Scribed by Bernard H. Foing; Sergio Char; Slobodan Jankov


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
504 KB
Volume
11
Category
Article
ISSN
0273-1177

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Miniaturized thermal flow sensor with pl
โœ M. Dijkstra; M.J. de Boer; J.W. Berenschot; T.S.J. Lammerink; R.J. Wiegerink; M. ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 845 KB

A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for water flow up to flow rates in the order of 300 nl min -1 . A versatile technological concept is used to realize a sensor with a thermally isolated freely suspended silicon-rich silicon-nitride microchann