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Effect of surface steps on sputtering and surface defect formation: molecular-dynamics study of 5 keV Xe+ bombardment of Pt(1 1 1) at glancing incidence angles

✍ Scribed by Andreas Friedrich; Herbert M. Urbassek


Book ID
108278783
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
930 KB
Volume
547
Category
Article
ISSN
0039-6028

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Using molecular-dynamics simulation, we study the sputtering of a Pt(1 1 1) surface under oblique and glancing incidence 5 keV Ar ions. For incidence angles larger than a critical angle # c , the projectile is reflected off the surface and the sputter yield is zero. We discuss the azimuth dependence