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EFFECT OF SURFACE ENERGY ON THE GROWTH OF DIAMOND-LIKE CARBON/AMORPHOUS SILICON FILMS ON VARIOUS SUBSTRATES

โœ Scribed by Srisang, C.; Asanithi, P.; Limsuwan, S.; Pokaipisit, A.; Limsuwan, P.


Book ID
121439122
Publisher
Taylor and Francis Group
Year
2013
Tongue
English
Weight
677 KB
Volume
41
Category
Article
ISSN
1073-9149

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Bilayered films composed of Diamond-like carbon (DLC) and silicon (Si) were prepared on the surface of polymethylmethacrylate (PMMA) substrates using plasma enhanced chemical vapor deposition (PECVD) and magnetron sputtering deposition. The deposited films were investigated by means of Atomic force