Effect of superlattices on the low-energy ion-induced damage in GaAs/Al(Ga)As structures: Channeling or diffusion?

✍ Scribed by Green, D. L.

• Book ID: 127182393
• Publisher: AVS (American Vacuum Society)
• Year: 1994
• Tongue: English
• Weight: 618 KB
• Volume: 12
• Category: Article
• ISSN: 0734-211X
• DOI: 10.1116/1.587618