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Effect of substrate temperature on the properties of electron beam deposited tantalum films

โœ Scribed by Arshi, Nishat; Lu, Junqing; Lee, Chan Gyu; Koo, Bon Heun; Ahmed, Faheem


Book ID
121462312
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
879 KB
Volume
546
Category
Article
ISSN
0040-6090

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Influence of substrate temperature on th
โœ M. G. Syed Basheer Ahamed; V. S. Nagarethinam; A. R. Balu; A. Thayumanavan; K. R ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 284 KB ๐Ÿ‘ 3 views

## Abstract ZnSe films were deposited on glass substrates keeping the substrate temperatures, at room temperature (RT), 75, 150 and 250 ยฐC. The films have exhibited cubic structure oriented along the (111) direction. Both the crystallinity and the grain size increased with increasing deposition tem