Effect of sputtering target power density on topography and residual stress during growth of nanocomposite nc-TiN/a-SiNx thin films

✍ Scribed by Zhang, Sam; Sun, Deen; Fu, Yongqing; Du, Hejun; Zhang, Qing

• Book ID: 122817878
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 472 KB
• Volume: 13
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2004.03.008