Effect of slot antenna structures on production of large-area planar surface wave plasmas excited at 2.45 GHz

✍ Scribed by Nagatsu, M; Morita, S; Ghanashev, I; Ito, A; Toyoda, N; Sugai, H

• Book ID: 120529000
• Publisher: Institute of Physics
• Year: 2000
• Tongue: English
• Weight: 331 KB
• Volume: 33
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/33/10/302