Effect of Roughness of Hydrogenated Si(111) Surfaces on Defect Annealing and Formation under Excimer Laser Irradiation

✍ Scribed by Timoshenko, V. Yu. ;Dittrich, Th. ;Rappich, J.

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 92 KB
• Volume: 173
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/(sici)1521-396x(199906)173:2<r3::aid-pssa99993>3.0.co;2-7