Effect of RF on RF nitrogen discharge with induced argon plasma at high pressure

✍ Scribed by WANG, YINAN; LIU, YUE; ZHENG, SHU; LIN, GUOQIANG

• Book ID: 120233259
• Publisher: Cambridge University Press
• Year: 2012
• Tongue: English
• Weight: 306 KB
• Volume: 78
• Category: Article
• ISSN: 0022-3778
• DOI: 10.1017/S0022377812000566