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Effect of residual stress on RF MEMS switch

✍ Scribed by Shankar Dutta; Mohd Imran; Ramjay Pal; K. K. Jain; R. Chatterjee

Book ID: 106186162
Publisher: Springer-Verlag
Year: 2011
Tongue: English
Weight: 749 KB
Volume: 17
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-011-1360-5

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