✦ LIBER ✦
Effect of reactor geometry on growth rate of epitaxial silicon : R. W. Andrews, D. M. Rynne and E. G. Wright, Solid St. Technol., October (1969), p. 61
- Publisher
- Elsevier Science
- Year
- 1970
- Tongue
- English
- Weight
- 110 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0026-2714
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