Effect of process parameters on synthesis of aluminum nitride powder prepared by chemical vapor deposition

✍ Scribed by Moo-Chin Wang; Ming-Sung Tsai; Nan-Chung Wu

• Book ID: 110366753
• Publisher: Springer
• Year: 2001
• Tongue: English
• Weight: 221 KB
• Volume: 36
• Category: Article
• ISSN: 0022-2461
• DOI: 10.1023/a:1017907024197