Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing

✍ Scribed by Gwangpyo Choi; L. Satyanarayana; Jinseong Park

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 467 KB
• Volume: 252
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2005.09.069