Effect of process parameters on electrical, optical properties of IZO films produced by inclination opposite target type DC magnetron sputtering

✍ Scribed by Do-Hoon SHIN; Yun-Hae KIM; Joong-Won HAN; Kyung-Man MOON; Ri-Ichi MURAKAMI

• Book ID: 117693784
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 510 KB
• Volume: 19
• Category: Article
• ISSN: 1003-6326
• DOI: 10.1016/s1003-6326(08)60394-5