Effect of pre-oxidation HF treatment on the tunnel oxide (SiOx) grown at high pressure

✍ Scribed by E.T. Paul Benny; J. Majhi

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 601 KB
• Volume: 205
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(91)90305-h